Study of ion beam sputtering using a glow discharge ion source
نویسندگان
چکیده
منابع مشابه
A glow discharge ion source with fourier transform ion cyclotron resonance mass spectrometric detection.
A glow discharge (CD) ion source has been coupled to a Fourier transform ion cyclotron resonance (FT-ICR) mass spectrometer using a four-element electrostatic lens to accelerate and focus ions generated external to the instrument's high magnetic field into its analyzer cell. Like other CD mass spectrometers, GD-FT-ICR can provide a quantitative measure of bulk analyte concentration with good pr...
متن کاملHardness and Stress of Amorphous Carbon Films Deposited by Glow Discharge and Ion Beam Assisting Deposition
The hardness and stress of amorphous carbon lms prepared by glow discharge and by ion beam assisting deposition are investigated. Relatively hard and almost stress free amorphous carbon lms were deposited by the glow discharge technique. On the other hand, by using the ion beam assisting deposition, hard lms were also obtained with a stress of the same order of those found in tetrahedral amorph...
متن کاملBernas ion source discharge simulation.
As the technology and applications continue to grow up, the development of plasma and ion sources with clearly specified characteristic is required. Therefore comprehensive numerical studies at the project stage are the key point for ion implantation source manufacturing (especially for low energy implantation). Recently the most commonly encountered numerical approach is the Monte Carlo partic...
متن کاملEffect of Thickness on Structural and Morphological Properties of AlN Films Prepared Using Single Ion Beam Sputtering
Aluminum nitride (AlN) thin films have potential applications in microelectronic and optoelectronic devices. In this study, AlN thin films with different thicknesses were deposited on silicon substrate by single ion beam sputtering method. The X-ray diffraction (XRD) spectra revealed that the structure of films with thickness of - nm was amorphous, while the polycrystalline hexagonal AlN with a...
متن کاملSelf-organized ordering of nanostructures produced by ion-beam sputtering.
We study the self-organized ordering of nanostructures produced by ion-beam sputtering of targets amorphizing under irradiation. By introducing a model akin to models of pattern formation in aeolian sand dunes, we extend consistently the current continuum theory of erosion by IBS. We obtain new nonlinear effects responsible for the in-plane ordering of the structures, whose strength correlates ...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Brazilian Journal of Physics
سال: 2010
ISSN: 0103-9733
DOI: 10.1590/s0103-97332010000100005